8/13/2012	3:43:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2012	3:43:36 PM	Recipe started at 3:43 PM
8/13/2012	3:43:36 PM	Helium valve closed
8/13/2012	3:43:36 PM	H2 valve closed
8/13/2012	3:43:36 PM	BCl3 valve closed
8/13/2012	3:43:36 PM	PH3 valve closed
8/13/2012	3:43:36 PM	SiCl4 pre valve closed
8/13/2012	3:43:36 PM	SiCl4 post valve closed
8/13/2012	3:43:36 PM	Main Vac valve closed
8/13/2012	3:43:36 PM	Bypass valve closed
8/13/2012	3:43:36 PM	Bubbler valve closed
8/13/2012	3:43:36 PM	Helium MFC set to  0.000000
8/13/2012	3:43:36 PM	H2 MFC set to  0.000000
8/13/2012	3:43:36 PM	BCl3 MFC set to  0.000000
8/13/2012	3:43:36 PM	PH3 MFC set to  0.000000
8/13/2012	3:43:36 PM	SiCl4 MFC set to  0.000000
8/13/2012	3:43:36 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	3:43:36 PM	Tube furnace set to 0
8/13/2012	3:43:39 PM	H2 valve closed
8/13/2012	3:43:39 PM	BCl3 valve closed
8/13/2012	3:43:39 PM	PH3 valve closed
8/13/2012	3:43:39 PM	SiCl4 pre valve closed
8/13/2012	3:43:39 PM	SiCl4 post valve closed
8/13/2012	3:43:39 PM	Main Vac valve closed
8/13/2012	3:43:39 PM	Bypass valve closed
8/13/2012	3:43:39 PM	Bubbler valve closed
8/13/2012	3:43:39 PM	Helium valve opened
8/13/2012	3:43:39 PM	Helium MFC set to  500.000000
8/13/2012	3:43:39 PM	H2 MFC set to  0.000000
8/13/2012	3:43:39 PM	BCl3 MFC set to  0.000000
8/13/2012	3:43:39 PM	PH3 MFC set to  0.000000
8/13/2012	3:43:39 PM	SiCl4 MFC set to  0.000000
8/13/2012	3:43:39 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	3:43:39 PM	Tube furnace set to 0
8/13/2012	3:44:51 PM	Helium valve closed
8/13/2012	3:44:51 PM	H2 valve closed
8/13/2012	3:44:51 PM	BCl3 valve closed
8/13/2012	3:44:51 PM	PH3 valve closed
8/13/2012	3:44:51 PM	SiCl4 pre valve closed
8/13/2012	3:44:51 PM	SiCl4 post valve closed
8/13/2012	3:44:51 PM	Main Vac valve closed
8/13/2012	3:44:51 PM	Bypass valve closed
8/13/2012	3:44:51 PM	Bubbler valve closed
8/13/2012	3:44:51 PM	Helium MFC set to  0.000000
8/13/2012	3:44:51 PM	H2 MFC set to  0.000000
8/13/2012	3:44:51 PM	BCl3 MFC set to  0.000000
8/13/2012	3:44:51 PM	PH3 MFC set to  0.000000
8/13/2012	3:44:51 PM	SiCl4 MFC set to  0.000000
8/13/2012	3:44:51 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	3:44:51 PM	Tube furnace set to 0
8/13/2012	3:44:52 PM	Run finished at 3:44 PM
8/13/2012	3:44:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2012	4:07:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2012	4:07:47 PM	Recipe started at 4:07 PM
8/13/2012	4:07:47 PM	Helium valve closed
8/13/2012	4:07:47 PM	H2 valve closed
8/13/2012	4:07:47 PM	BCl3 valve closed
8/13/2012	4:07:47 PM	PH3 valve closed
8/13/2012	4:07:47 PM	SiCl4 pre valve closed
8/13/2012	4:07:47 PM	SiCl4 post valve closed
8/13/2012	4:07:47 PM	Main Vac valve closed
8/13/2012	4:07:47 PM	Bubbler valve closed
8/13/2012	4:07:47 PM	Bypass valve opened
8/13/2012	4:07:47 PM	Helium MFC set to  0.000000
8/13/2012	4:07:47 PM	H2 MFC set to  0.000000
8/13/2012	4:07:47 PM	BCl3 MFC set to  0.000000
8/13/2012	4:07:47 PM	PH3 MFC set to  0.000000
8/13/2012	4:07:47 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:07:47 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:07:48 PM	Tube furnace set to 0
8/13/2012	4:09:07 PM	Helium valve closed
8/13/2012	4:09:07 PM	H2 valve closed
8/13/2012	4:09:07 PM	BCl3 valve closed
8/13/2012	4:09:07 PM	PH3 valve closed
8/13/2012	4:09:07 PM	SiCl4 pre valve closed
8/13/2012	4:09:07 PM	SiCl4 post valve closed
8/13/2012	4:09:07 PM	Main Vac valve closed
8/13/2012	4:09:07 PM	Bubbler valve closed
8/13/2012	4:09:07 PM	Bypass valve opened
8/13/2012	4:09:07 PM	Helium MFC set to  0.000000
8/13/2012	4:09:07 PM	H2 MFC set to  0.000000
8/13/2012	4:09:07 PM	BCl3 MFC set to  0.000000
8/13/2012	4:09:07 PM	PH3 MFC set to  0.000000
8/13/2012	4:09:07 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:09:07 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:09:08 PM	Tube furnace set to 0
8/13/2012	4:09:12 PM	Helium valve closed
8/13/2012	4:09:12 PM	H2 valve closed
8/13/2012	4:09:12 PM	BCl3 valve closed
8/13/2012	4:09:12 PM	PH3 valve closed
8/13/2012	4:09:12 PM	SiCl4 pre valve closed
8/13/2012	4:09:12 PM	SiCl4 post valve closed
8/13/2012	4:09:12 PM	Bypass valve closed
8/13/2012	4:09:12 PM	Bubbler valve closed
8/13/2012	4:09:12 PM	Main Vac valve opened
8/13/2012	4:09:12 PM	Helium MFC set to  0.000000
8/13/2012	4:09:12 PM	H2 MFC set to  0.000000
8/13/2012	4:09:12 PM	BCl3 MFC set to  0.000000
8/13/2012	4:09:12 PM	PH3 MFC set to  0.000000
8/13/2012	4:09:12 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:09:12 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:09:13 PM	Tube furnace set to 0
8/13/2012	4:09:14 PM	Run finished at 4:09 PM
8/13/2012	4:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2012	4:10:21 PM	Helium MFC set to  10.000000
8/13/2012	4:10:23 PM	Helium valve opened
8/13/2012	4:10:28 PM	Helium valve closed
8/13/2012	4:10:39 PM	Helium valve opened
8/13/2012	4:10:44 PM	Helium valve closed
8/13/2012	4:10:53 PM	Main Vac valve closed
8/13/2012	4:10:58 PM	Main Vac valve opened
8/13/2012	4:11:03 PM	Tube furnace set to 150
8/13/2012	4:12:01 PM	Helium valve opened
8/13/2012	4:12:08 PM	Helium MFC set to  20.000000
8/13/2012	4:12:10 PM	Helium valve closed
8/13/2012	4:13:22 PM	Helium valve opened
8/13/2012	4:13:34 PM	Helium valve closed
8/13/2012	4:13:55 PM	Helium valve opened
8/13/2012	4:14:06 PM	Helium valve closed
8/13/2012	4:14:37 PM	Recipe started at 4:14 PM
8/13/2012	4:14:37 PM	Helium valve closed
8/13/2012	4:14:37 PM	H2 valve closed
8/13/2012	4:14:37 PM	BCl3 valve closed
8/13/2012	4:14:37 PM	PH3 valve closed
8/13/2012	4:14:37 PM	SiCl4 pre valve closed
8/13/2012	4:14:37 PM	SiCl4 post valve closed
8/13/2012	4:14:37 PM	Bypass valve closed
8/13/2012	4:14:37 PM	Bubbler valve closed
8/13/2012	4:14:37 PM	Main Vac valve opened
8/13/2012	4:14:37 PM	Helium MFC set to  0.000000
8/13/2012	4:14:37 PM	H2 MFC set to  0.000000
8/13/2012	4:14:37 PM	BCl3 MFC set to  0.000000
8/13/2012	4:14:37 PM	PH3 MFC set to  0.000000
8/13/2012	4:14:37 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:14:37 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:14:37 PM	Tube furnace set to 150
8/13/2012	4:15:07 PM	H2 valve closed
8/13/2012	4:15:07 PM	BCl3 valve closed
8/13/2012	4:15:07 PM	PH3 valve closed
8/13/2012	4:15:07 PM	SiCl4 pre valve closed
8/13/2012	4:15:07 PM	SiCl4 post valve closed
8/13/2012	4:15:07 PM	Bypass valve closed
8/13/2012	4:15:07 PM	Bubbler valve closed
8/13/2012	4:15:07 PM	Helium valve opened
8/13/2012	4:15:08 PM	Main Vac valve opened
8/13/2012	4:15:08 PM	Helium MFC set to  20.000000
8/13/2012	4:15:08 PM	H2 MFC set to  0.000000
8/13/2012	4:15:08 PM	BCl3 MFC set to  0.000000
8/13/2012	4:15:08 PM	PH3 MFC set to  0.000000
8/13/2012	4:15:08 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:15:08 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:15:08 PM	Tube furnace set to 150
8/13/2012	4:15:38 PM	Helium valve closed
8/13/2012	4:15:38 PM	H2 valve closed
8/13/2012	4:15:38 PM	BCl3 valve closed
8/13/2012	4:15:38 PM	PH3 valve closed
8/13/2012	4:15:38 PM	SiCl4 pre valve closed
8/13/2012	4:15:38 PM	SiCl4 post valve closed
8/13/2012	4:15:38 PM	Bypass valve closed
8/13/2012	4:15:38 PM	Bubbler valve closed
8/13/2012	4:15:38 PM	Main Vac valve opened
8/13/2012	4:15:38 PM	Helium MFC set to  0.000000
8/13/2012	4:15:38 PM	H2 MFC set to  0.000000
8/13/2012	4:15:38 PM	BCl3 MFC set to  0.000000
8/13/2012	4:15:38 PM	PH3 MFC set to  0.000000
8/13/2012	4:15:38 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:15:38 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:15:38 PM	Tube furnace set to 150
8/13/2012	4:20:38 PM	H2 valve closed
8/13/2012	4:20:38 PM	BCl3 valve closed
8/13/2012	4:20:38 PM	PH3 valve closed
8/13/2012	4:20:38 PM	SiCl4 pre valve closed
8/13/2012	4:20:38 PM	SiCl4 post valve closed
8/13/2012	4:20:38 PM	Bypass valve closed
8/13/2012	4:20:38 PM	Bubbler valve closed
8/13/2012	4:20:38 PM	Helium valve opened
8/13/2012	4:20:38 PM	Main Vac valve opened
8/13/2012	4:20:38 PM	Helium MFC set to  20.000000
8/13/2012	4:20:38 PM	H2 MFC set to  0.000000
8/13/2012	4:20:38 PM	BCl3 MFC set to  0.000000
8/13/2012	4:20:38 PM	PH3 MFC set to  0.000000
8/13/2012	4:20:38 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:20:38 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:20:38 PM	Tube furnace set to 150
8/13/2012	4:21:08 PM	Helium valve closed
8/13/2012	4:21:08 PM	H2 valve closed
8/13/2012	4:21:08 PM	BCl3 valve closed
8/13/2012	4:21:08 PM	PH3 valve closed
8/13/2012	4:21:08 PM	SiCl4 pre valve closed
8/13/2012	4:21:08 PM	SiCl4 post valve closed
8/13/2012	4:21:08 PM	Bypass valve closed
8/13/2012	4:21:08 PM	Bubbler valve closed
8/13/2012	4:21:08 PM	Main Vac valve opened
8/13/2012	4:21:08 PM	Helium MFC set to  0.000000
8/13/2012	4:21:08 PM	H2 MFC set to  0.000000
8/13/2012	4:21:08 PM	BCl3 MFC set to  0.000000
8/13/2012	4:21:08 PM	PH3 MFC set to  0.000000
8/13/2012	4:21:08 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:21:08 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:21:08 PM	Tube furnace set to 150
8/13/2012	4:21:38 PM	H2 valve closed
8/13/2012	4:21:38 PM	BCl3 valve closed
8/13/2012	4:21:38 PM	PH3 valve closed
8/13/2012	4:21:38 PM	SiCl4 pre valve closed
8/13/2012	4:21:38 PM	SiCl4 post valve closed
8/13/2012	4:21:38 PM	Bypass valve closed
8/13/2012	4:21:38 PM	Bubbler valve closed
8/13/2012	4:21:38 PM	Helium valve opened
8/13/2012	4:21:38 PM	Main Vac valve opened
8/13/2012	4:21:38 PM	Helium MFC set to  20.000000
8/13/2012	4:21:38 PM	H2 MFC set to  0.000000
8/13/2012	4:21:38 PM	BCl3 MFC set to  0.000000
8/13/2012	4:21:38 PM	PH3 MFC set to  0.000000
8/13/2012	4:21:38 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:21:38 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:21:39 PM	Tube furnace set to 150
8/13/2012	4:22:09 PM	Helium valve closed
8/13/2012	4:22:09 PM	H2 valve closed
8/13/2012	4:22:09 PM	BCl3 valve closed
8/13/2012	4:22:09 PM	PH3 valve closed
8/13/2012	4:22:09 PM	SiCl4 pre valve closed
8/13/2012	4:22:09 PM	SiCl4 post valve closed
8/13/2012	4:22:09 PM	Bypass valve closed
8/13/2012	4:22:09 PM	Bubbler valve closed
8/13/2012	4:22:09 PM	Main Vac valve opened
8/13/2012	4:22:09 PM	Helium MFC set to  0.000000
8/13/2012	4:22:09 PM	H2 MFC set to  0.000000
8/13/2012	4:22:09 PM	BCl3 MFC set to  0.000000
8/13/2012	4:22:09 PM	PH3 MFC set to  0.000000
8/13/2012	4:22:09 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:22:09 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:22:09 PM	Tube furnace set to 150
8/13/2012	4:22:39 PM	H2 valve closed
8/13/2012	4:22:39 PM	BCl3 valve closed
8/13/2012	4:22:39 PM	PH3 valve closed
8/13/2012	4:22:39 PM	SiCl4 pre valve closed
8/13/2012	4:22:39 PM	SiCl4 post valve closed
8/13/2012	4:22:39 PM	Bypass valve closed
8/13/2012	4:22:39 PM	Bubbler valve closed
8/13/2012	4:22:39 PM	Helium valve opened
8/13/2012	4:22:39 PM	Main Vac valve opened
8/13/2012	4:22:39 PM	Helium MFC set to  20.000000
8/13/2012	4:22:39 PM	H2 MFC set to  0.000000
8/13/2012	4:22:39 PM	BCl3 MFC set to  0.000000
8/13/2012	4:22:39 PM	PH3 MFC set to  0.000000
8/13/2012	4:22:39 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:22:39 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:22:39 PM	Tube furnace set to 150
8/13/2012	4:23:09 PM	Helium valve closed
8/13/2012	4:23:09 PM	H2 valve closed
8/13/2012	4:23:09 PM	BCl3 valve closed
8/13/2012	4:23:09 PM	PH3 valve closed
8/13/2012	4:23:09 PM	SiCl4 pre valve closed
8/13/2012	4:23:09 PM	SiCl4 post valve closed
8/13/2012	4:23:09 PM	Bypass valve closed
8/13/2012	4:23:09 PM	Bubbler valve closed
8/13/2012	4:23:09 PM	Main Vac valve opened
8/13/2012	4:23:09 PM	Helium MFC set to  0.000000
8/13/2012	4:23:09 PM	H2 MFC set to  0.000000
8/13/2012	4:23:09 PM	BCl3 MFC set to  0.000000
8/13/2012	4:23:09 PM	PH3 MFC set to  0.000000
8/13/2012	4:23:09 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:23:09 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:23:09 PM	Tube furnace set to 150
8/13/2012	4:23:39 PM	H2 valve closed
8/13/2012	4:23:39 PM	BCl3 valve closed
8/13/2012	4:23:39 PM	PH3 valve closed
8/13/2012	4:23:39 PM	SiCl4 pre valve closed
8/13/2012	4:23:39 PM	SiCl4 post valve closed
8/13/2012	4:23:39 PM	Bypass valve closed
8/13/2012	4:23:39 PM	Bubbler valve closed
8/13/2012	4:23:39 PM	Helium valve opened
8/13/2012	4:23:39 PM	Main Vac valve opened
8/13/2012	4:23:39 PM	Helium MFC set to  20.000000
8/13/2012	4:23:39 PM	H2 MFC set to  0.000000
8/13/2012	4:23:39 PM	BCl3 MFC set to  0.000000
8/13/2012	4:23:39 PM	PH3 MFC set to  0.000000
8/13/2012	4:23:39 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:23:39 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:23:40 PM	Tube furnace set to 150
8/13/2012	4:24:10 PM	Helium valve closed
8/13/2012	4:24:10 PM	H2 valve closed
8/13/2012	4:24:10 PM	BCl3 valve closed
8/13/2012	4:24:10 PM	PH3 valve closed
8/13/2012	4:24:10 PM	SiCl4 pre valve closed
8/13/2012	4:24:10 PM	SiCl4 post valve closed
8/13/2012	4:24:10 PM	Bypass valve closed
8/13/2012	4:24:10 PM	Bubbler valve closed
8/13/2012	4:24:10 PM	Main Vac valve opened
8/13/2012	4:24:10 PM	Helium MFC set to  0.000000
8/13/2012	4:24:10 PM	H2 MFC set to  0.000000
8/13/2012	4:24:10 PM	BCl3 MFC set to  0.000000
8/13/2012	4:24:10 PM	PH3 MFC set to  0.000000
8/13/2012	4:24:10 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:24:10 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:24:10 PM	Tube furnace set to 150
8/13/2012	4:24:40 PM	H2 valve closed
8/13/2012	4:24:40 PM	BCl3 valve closed
8/13/2012	4:24:40 PM	PH3 valve closed
8/13/2012	4:24:40 PM	SiCl4 pre valve closed
8/13/2012	4:24:40 PM	SiCl4 post valve closed
8/13/2012	4:24:40 PM	Bypass valve closed
8/13/2012	4:24:40 PM	Bubbler valve closed
8/13/2012	4:24:40 PM	Helium valve opened
8/13/2012	4:24:40 PM	Main Vac valve opened
8/13/2012	4:24:40 PM	Helium MFC set to  20.000000
8/13/2012	4:24:40 PM	H2 MFC set to  0.000000
8/13/2012	4:24:40 PM	BCl3 MFC set to  0.000000
8/13/2012	4:24:40 PM	PH3 MFC set to  0.000000
8/13/2012	4:24:40 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:24:40 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:24:40 PM	Tube furnace set to 150
8/13/2012	4:25:10 PM	Helium valve closed
8/13/2012	4:25:10 PM	H2 valve closed
8/13/2012	4:25:10 PM	BCl3 valve closed
8/13/2012	4:25:10 PM	PH3 valve closed
8/13/2012	4:25:10 PM	SiCl4 pre valve closed
8/13/2012	4:25:10 PM	SiCl4 post valve closed
8/13/2012	4:25:10 PM	Bypass valve closed
8/13/2012	4:25:10 PM	Bubbler valve closed
8/13/2012	4:25:10 PM	Main Vac valve opened
8/13/2012	4:25:10 PM	Helium MFC set to  0.000000
8/13/2012	4:25:10 PM	H2 MFC set to  0.000000
8/13/2012	4:25:10 PM	BCl3 MFC set to  0.000000
8/13/2012	4:25:10 PM	PH3 MFC set to  0.000000
8/13/2012	4:25:10 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:25:10 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:25:10 PM	Tube furnace set to 150
8/13/2012	4:25:40 PM	H2 valve closed
8/13/2012	4:25:40 PM	BCl3 valve closed
8/13/2012	4:25:40 PM	PH3 valve closed
8/13/2012	4:25:40 PM	SiCl4 pre valve closed
8/13/2012	4:25:40 PM	SiCl4 post valve closed
8/13/2012	4:25:40 PM	Bypass valve closed
8/13/2012	4:25:40 PM	Bubbler valve closed
8/13/2012	4:25:40 PM	Helium valve opened
8/13/2012	4:25:40 PM	Main Vac valve opened
8/13/2012	4:25:40 PM	Helium MFC set to  20.000000
8/13/2012	4:25:40 PM	H2 MFC set to  0.000000
8/13/2012	4:25:40 PM	BCl3 MFC set to  0.000000
8/13/2012	4:25:40 PM	PH3 MFC set to  0.000000
8/13/2012	4:25:40 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:25:40 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:25:41 PM	Tube furnace set to 150
8/13/2012	4:26:11 PM	Helium valve closed
8/13/2012	4:26:11 PM	H2 valve closed
8/13/2012	4:26:11 PM	BCl3 valve closed
8/13/2012	4:26:11 PM	PH3 valve closed
8/13/2012	4:26:11 PM	SiCl4 pre valve closed
8/13/2012	4:26:11 PM	SiCl4 post valve closed
8/13/2012	4:26:11 PM	Bypass valve closed
8/13/2012	4:26:11 PM	Bubbler valve closed
8/13/2012	4:26:11 PM	Main Vac valve opened
8/13/2012	4:26:11 PM	Helium MFC set to  0.000000
8/13/2012	4:26:11 PM	H2 MFC set to  0.000000
8/13/2012	4:26:11 PM	BCl3 MFC set to  0.000000
8/13/2012	4:26:11 PM	PH3 MFC set to  0.000000
8/13/2012	4:26:11 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:26:11 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:26:11 PM	Tube furnace set to 150
8/13/2012	4:26:41 PM	H2 valve closed
8/13/2012	4:26:41 PM	BCl3 valve closed
8/13/2012	4:26:41 PM	PH3 valve closed
8/13/2012	4:26:41 PM	SiCl4 pre valve closed
8/13/2012	4:26:41 PM	SiCl4 post valve closed
8/13/2012	4:26:41 PM	Bypass valve closed
8/13/2012	4:26:41 PM	Bubbler valve closed
8/13/2012	4:26:41 PM	Helium valve opened
8/13/2012	4:26:41 PM	Main Vac valve opened
8/13/2012	4:26:41 PM	Helium MFC set to  20.000000
8/13/2012	4:26:41 PM	H2 MFC set to  0.000000
8/13/2012	4:26:41 PM	BCl3 MFC set to  0.000000
8/13/2012	4:26:41 PM	PH3 MFC set to  0.000000
8/13/2012	4:26:41 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:26:41 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:26:41 PM	Tube furnace set to 150
8/13/2012	4:27:11 PM	Helium valve closed
8/13/2012	4:27:11 PM	H2 valve closed
8/13/2012	4:27:11 PM	BCl3 valve closed
8/13/2012	4:27:11 PM	PH3 valve closed
8/13/2012	4:27:11 PM	SiCl4 pre valve closed
8/13/2012	4:27:11 PM	SiCl4 post valve closed
8/13/2012	4:27:11 PM	Bypass valve closed
8/13/2012	4:27:11 PM	Bubbler valve closed
8/13/2012	4:27:11 PM	Main Vac valve opened
8/13/2012	4:27:11 PM	Helium MFC set to  0.000000
8/13/2012	4:27:11 PM	H2 MFC set to  0.000000
8/13/2012	4:27:11 PM	BCl3 MFC set to  0.000000
8/13/2012	4:27:11 PM	PH3 MFC set to  0.000000
8/13/2012	4:27:11 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:27:11 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:27:11 PM	Tube furnace set to 150
8/13/2012	4:27:41 PM	H2 valve closed
8/13/2012	4:27:41 PM	BCl3 valve closed
8/13/2012	4:27:41 PM	PH3 valve closed
8/13/2012	4:27:41 PM	SiCl4 pre valve closed
8/13/2012	4:27:41 PM	SiCl4 post valve closed
8/13/2012	4:27:41 PM	Bypass valve closed
8/13/2012	4:27:41 PM	Bubbler valve closed
8/13/2012	4:27:41 PM	Helium valve opened
8/13/2012	4:27:41 PM	Main Vac valve opened
8/13/2012	4:27:41 PM	Helium MFC set to  20.000000
8/13/2012	4:27:41 PM	H2 MFC set to  0.000000
8/13/2012	4:27:41 PM	BCl3 MFC set to  0.000000
8/13/2012	4:27:41 PM	PH3 MFC set to  0.000000
8/13/2012	4:27:41 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:27:41 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:27:41 PM	Tube furnace set to 150
8/13/2012	4:28:11 PM	Helium valve closed
8/13/2012	4:28:11 PM	H2 valve closed
8/13/2012	4:28:11 PM	BCl3 valve closed
8/13/2012	4:28:11 PM	PH3 valve closed
8/13/2012	4:28:11 PM	SiCl4 pre valve closed
8/13/2012	4:28:11 PM	SiCl4 post valve closed
8/13/2012	4:28:12 PM	Bypass valve closed
8/13/2012	4:28:12 PM	Bubbler valve closed
8/13/2012	4:28:12 PM	Main Vac valve opened
8/13/2012	4:28:12 PM	Helium MFC set to  0.000000
8/13/2012	4:28:12 PM	H2 MFC set to  0.000000
8/13/2012	4:28:12 PM	BCl3 MFC set to  0.000000
8/13/2012	4:28:12 PM	PH3 MFC set to  0.000000
8/13/2012	4:28:12 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:28:12 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:28:12 PM	Tube furnace set to 150
8/13/2012	4:28:42 PM	H2 valve closed
8/13/2012	4:28:42 PM	BCl3 valve closed
8/13/2012	4:28:42 PM	PH3 valve closed
8/13/2012	4:28:42 PM	SiCl4 pre valve closed
8/13/2012	4:28:42 PM	SiCl4 post valve closed
8/13/2012	4:28:42 PM	Bypass valve closed
8/13/2012	4:28:42 PM	Bubbler valve closed
8/13/2012	4:28:42 PM	Helium valve opened
8/13/2012	4:28:42 PM	Main Vac valve opened
8/13/2012	4:28:42 PM	Helium MFC set to  20.000000
8/13/2012	4:28:42 PM	H2 MFC set to  0.000000
8/13/2012	4:28:42 PM	BCl3 MFC set to  0.000000
8/13/2012	4:28:42 PM	PH3 MFC set to  0.000000
8/13/2012	4:28:42 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:28:42 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:28:42 PM	Tube furnace set to 150
8/13/2012	4:29:12 PM	Helium valve closed
8/13/2012	4:29:12 PM	H2 valve closed
8/13/2012	4:29:12 PM	BCl3 valve closed
8/13/2012	4:29:12 PM	PH3 valve closed
8/13/2012	4:29:12 PM	SiCl4 pre valve closed
8/13/2012	4:29:12 PM	SiCl4 post valve closed
8/13/2012	4:29:12 PM	Bypass valve closed
8/13/2012	4:29:12 PM	Bubbler valve closed
8/13/2012	4:29:12 PM	Main Vac valve opened
8/13/2012	4:29:12 PM	Helium MFC set to  0.000000
8/13/2012	4:29:12 PM	H2 MFC set to  0.000000
8/13/2012	4:29:12 PM	BCl3 MFC set to  0.000000
8/13/2012	4:29:12 PM	PH3 MFC set to  0.000000
8/13/2012	4:29:12 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:29:12 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:29:12 PM	Tube furnace set to 150
8/13/2012	4:29:13 PM	Run finished at 4:29 PM
8/13/2012	4:51:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/13/2012	4:51:58 PM	Recipe started at 4:51 PM
8/13/2012	4:51:58 PM	Helium valve closed
8/13/2012	4:51:58 PM	H2 valve closed
8/13/2012	4:51:58 PM	BCl3 valve closed
8/13/2012	4:51:58 PM	PH3 valve closed
8/13/2012	4:51:58 PM	SiCl4 pre valve closed
8/13/2012	4:51:58 PM	SiCl4 post valve closed
8/13/2012	4:51:58 PM	Main Vac valve closed
8/13/2012	4:51:58 PM	Bubbler valve closed
8/13/2012	4:51:58 PM	Bypass valve opened
8/13/2012	4:51:58 PM	Helium MFC set to  0.000000
8/13/2012	4:51:58 PM	H2 MFC set to  0.000000
8/13/2012	4:51:58 PM	BCl3 MFC set to  0.000000
8/13/2012	4:51:58 PM	PH3 MFC set to  0.000000
8/13/2012	4:51:58 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:51:58 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:51:58 PM	Tube furnace set to 0
8/13/2012	4:51:58 PM	Helium valve closed
8/13/2012	4:51:58 PM	H2 valve closed
8/13/2012	4:51:58 PM	BCl3 valve closed
8/13/2012	4:51:58 PM	PH3 valve closed
8/13/2012	4:51:58 PM	SiCl4 pre valve closed
8/13/2012	4:51:58 PM	SiCl4 post valve closed
8/13/2012	4:51:58 PM	Main Vac valve closed
8/13/2012	4:51:58 PM	Bubbler valve closed
8/13/2012	4:51:58 PM	Bypass valve opened
8/13/2012	4:51:58 PM	Helium MFC set to  0.000000
8/13/2012	4:51:58 PM	H2 MFC set to  0.000000
8/13/2012	4:51:58 PM	BCl3 MFC set to  0.000000
8/13/2012	4:51:58 PM	PH3 MFC set to  0.000000
8/13/2012	4:51:58 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:51:58 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:51:58 PM	Tube furnace set to 0
8/13/2012	4:52:01 PM	Helium valve closed
8/13/2012	4:52:01 PM	H2 valve closed
8/13/2012	4:52:01 PM	BCl3 valve closed
8/13/2012	4:52:01 PM	PH3 valve closed
8/13/2012	4:52:01 PM	SiCl4 pre valve closed
8/13/2012	4:52:01 PM	SiCl4 post valve closed
8/13/2012	4:52:01 PM	Bypass valve closed
8/13/2012	4:52:01 PM	Bubbler valve closed
8/13/2012	4:52:01 PM	Main Vac valve opened
8/13/2012	4:52:01 PM	Helium MFC set to  0.000000
8/13/2012	4:52:01 PM	H2 MFC set to  0.000000
8/13/2012	4:52:01 PM	BCl3 MFC set to  0.000000
8/13/2012	4:52:01 PM	PH3 MFC set to  0.000000
8/13/2012	4:52:01 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:52:01 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:52:02 PM	Tube furnace set to 0
8/13/2012	4:52:08 PM	H2 valve closed
8/13/2012	4:52:08 PM	BCl3 valve closed
8/13/2012	4:52:08 PM	PH3 valve closed
8/13/2012	4:52:08 PM	SiCl4 pre valve closed
8/13/2012	4:52:08 PM	SiCl4 post valve closed
8/13/2012	4:52:08 PM	Bypass valve closed
8/13/2012	4:52:08 PM	Bubbler valve closed
8/13/2012	4:52:08 PM	Helium valve opened
8/13/2012	4:52:08 PM	Main Vac valve opened
8/13/2012	4:52:08 PM	Helium MFC set to  20.000000
8/13/2012	4:52:08 PM	H2 MFC set to  0.000000
8/13/2012	4:52:08 PM	BCl3 MFC set to  0.000000
8/13/2012	4:52:08 PM	PH3 MFC set to  0.000000
8/13/2012	4:52:08 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:52:08 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:52:08 PM	Tube furnace set to 0
8/13/2012	4:52:18 PM	Helium valve closed
8/13/2012	4:52:18 PM	H2 valve closed
8/13/2012	4:52:18 PM	BCl3 valve closed
8/13/2012	4:52:18 PM	PH3 valve closed
8/13/2012	4:52:18 PM	SiCl4 pre valve closed
8/13/2012	4:52:18 PM	SiCl4 post valve closed
8/13/2012	4:52:18 PM	Bypass valve closed
8/13/2012	4:52:18 PM	Bubbler valve closed
8/13/2012	4:52:18 PM	Main Vac valve opened
8/13/2012	4:52:18 PM	Helium MFC set to  0.000000
8/13/2012	4:52:18 PM	H2 MFC set to  0.000000
8/13/2012	4:52:18 PM	BCl3 MFC set to  0.000000
8/13/2012	4:52:18 PM	PH3 MFC set to  0.000000
8/13/2012	4:52:18 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:52:18 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:52:18 PM	Tube furnace set to 0
8/13/2012	4:52:44 PM	Run aborted at 4:52 PM
8/13/2012	4:52:45 PM	Helium valve closed
8/13/2012	4:52:45 PM	H2 valve closed
8/13/2012	4:52:45 PM	BCl3 valve closed
8/13/2012	4:52:45 PM	PH3 valve closed
8/13/2012	4:52:45 PM	SiCl4 pre valve closed
8/13/2012	4:52:45 PM	SiCl4 post valve closed
8/13/2012	4:52:45 PM	Bypass valve closed
8/13/2012	4:52:45 PM	Main Vac valve closed
8/13/2012	4:52:45 PM	Bubbler valve closed
8/13/2012	4:52:45 PM	Helium MFC set to  0.000000
8/13/2012	4:52:45 PM	H2 MFC set to  0.000000
8/13/2012	4:52:45 PM	BCl3 MFC set to  0.000000
8/13/2012	4:52:45 PM	PH3 MFC set to  0.000000
8/13/2012	4:52:45 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:52:45 PM	Tube furnace set to 0
8/13/2012	4:52:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/13/2012	4:52:57 PM	Main Vac valve opened
8/13/2012	4:53:20 PM	Main Vac valve closed
8/13/2012	4:53:35 PM	Main Vac valve opened
8/13/2012	4:54:22 PM	Helium MFC set to  10.000000
8/13/2012	4:54:23 PM	Helium valve opened
8/13/2012	4:54:40 PM	Helium valve closed
8/13/2012	4:55:15 PM	Recipe started at 4:55 PM
8/13/2012	4:55:15 PM	Helium valve closed
8/13/2012	4:55:15 PM	H2 valve closed
8/13/2012	4:55:15 PM	BCl3 valve closed
8/13/2012	4:55:15 PM	PH3 valve closed
8/13/2012	4:55:15 PM	SiCl4 pre valve closed
8/13/2012	4:55:15 PM	SiCl4 post valve closed
8/13/2012	4:55:15 PM	Main Vac valve closed
8/13/2012	4:55:15 PM	Bypass valve closed
8/13/2012	4:55:15 PM	Bubbler valve closed
8/13/2012	4:55:15 PM	Helium MFC set to  0.000000
8/13/2012	4:55:15 PM	H2 MFC set to  0.000000
8/13/2012	4:55:15 PM	BCl3 MFC set to  0.000000
8/13/2012	4:55:15 PM	PH3 MFC set to  0.000000
8/13/2012	4:55:16 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:55:16 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:55:16 PM	Tube furnace set to 0
8/13/2012	4:55:19 PM	Helium valve closed
8/13/2012	4:55:19 PM	BCl3 valve closed
8/13/2012	4:55:19 PM	PH3 valve closed
8/13/2012	4:55:19 PM	SiCl4 pre valve closed
8/13/2012	4:55:19 PM	SiCl4 post valve closed
8/13/2012	4:55:19 PM	Main Vac valve closed
8/13/2012	4:55:19 PM	Bypass valve closed
8/13/2012	4:55:19 PM	Bubbler valve closed
8/13/2012	4:55:19 PM	H2 valve opened
8/13/2012	4:55:19 PM	Helium MFC set to  0.000000
8/13/2012	4:55:19 PM	H2 MFC set to  500.000000
8/13/2012	4:55:19 PM	BCl3 MFC set to  0.000000
8/13/2012	4:55:19 PM	PH3 MFC set to  0.000000
8/13/2012	4:55:19 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:55:19 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:55:19 PM	Tube furnace set to 50
8/13/2012	4:56:30 PM	Helium valve closed
8/13/2012	4:56:30 PM	BCl3 valve closed
8/13/2012	4:56:30 PM	PH3 valve closed
8/13/2012	4:56:30 PM	SiCl4 pre valve closed
8/13/2012	4:56:30 PM	SiCl4 post valve closed
8/13/2012	4:56:30 PM	Main Vac valve closed
8/13/2012	4:56:30 PM	Bypass valve closed
8/13/2012	4:56:30 PM	H2 valve opened
8/13/2012	4:56:30 PM	Bubbler valve opened
8/13/2012	4:56:30 PM	Helium MFC set to  0.000000
8/13/2012	4:56:30 PM	H2 MFC set to  500.000000
8/13/2012	4:56:30 PM	BCl3 MFC set to  0.000000
8/13/2012	4:56:30 PM	PH3 MFC set to  0.000000
8/13/2012	4:56:30 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:56:30 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:56:31 PM	Tube furnace set to 50
8/13/2012	4:56:32 PM	Helium valve closed
8/13/2012	4:56:32 PM	BCl3 valve closed
8/13/2012	4:56:32 PM	PH3 valve closed
8/13/2012	4:56:32 PM	SiCl4 pre valve closed
8/13/2012	4:56:32 PM	SiCl4 post valve closed
8/13/2012	4:56:32 PM	Main Vac valve closed
8/13/2012	4:56:32 PM	Bypass valve closed
8/13/2012	4:56:32 PM	H2 valve opened
8/13/2012	4:56:32 PM	Bubbler valve opened
8/13/2012	4:56:32 PM	Helium MFC set to  0.000000
8/13/2012	4:56:32 PM	H2 MFC set to  500.000000
8/13/2012	4:56:32 PM	BCl3 MFC set to  0.000000
8/13/2012	4:56:32 PM	PH3 MFC set to  0.000000
8/13/2012	4:56:32 PM	SiCl4 MFC set to  0.000000
8/13/2012	4:56:32 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	4:56:32 PM	Tube furnace set to 1000
8/13/2012	5:16:32 PM	Helium valve closed
8/13/2012	5:16:32 PM	BCl3 valve closed
8/13/2012	5:16:32 PM	PH3 valve closed
8/13/2012	5:16:32 PM	Main Vac valve closed
8/13/2012	5:16:32 PM	Bypass valve closed
8/13/2012	5:16:32 PM	H2 valve opened
8/13/2012	5:16:32 PM	SiCl4 pre valve opened
8/13/2012	5:16:32 PM	SiCl4 post valve opened
8/13/2012	5:16:32 PM	Bubbler valve opened
8/13/2012	5:16:32 PM	Helium MFC set to  0.000000
8/13/2012	5:16:32 PM	H2 MFC set to  450.000000
8/13/2012	5:16:32 PM	BCl3 MFC set to  0.000000
8/13/2012	5:16:32 PM	PH3 MFC set to  0.000000
8/13/2012	5:16:32 PM	SiCl4 MFC set to  50.000000
8/13/2012	5:16:32 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:16:32 PM	Tube furnace set to 1000
8/13/2012	5:36:32 PM	Helium valve closed
8/13/2012	5:36:32 PM	BCl3 valve closed
8/13/2012	5:36:32 PM	PH3 valve closed
8/13/2012	5:36:32 PM	SiCl4 pre valve closed
8/13/2012	5:36:32 PM	SiCl4 post valve closed
8/13/2012	5:36:32 PM	Main Vac valve closed
8/13/2012	5:36:32 PM	Bypass valve closed
8/13/2012	5:36:32 PM	H2 valve opened
8/13/2012	5:36:32 PM	Bubbler valve opened
8/13/2012	5:36:32 PM	Helium MFC set to  0.000000
8/13/2012	5:36:32 PM	H2 MFC set to  500.000000
8/13/2012	5:36:32 PM	BCl3 MFC set to  0.000000
8/13/2012	5:36:32 PM	PH3 MFC set to  0.000000
8/13/2012	5:36:32 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:36:32 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:36:32 PM	Tube furnace set to 950
8/13/2012	5:39:32 PM	Helium valve closed
8/13/2012	5:39:32 PM	BCl3 valve closed
8/13/2012	5:39:32 PM	PH3 valve closed
8/13/2012	5:39:32 PM	SiCl4 pre valve closed
8/13/2012	5:39:32 PM	SiCl4 post valve closed
8/13/2012	5:39:32 PM	Main Vac valve closed
8/13/2012	5:39:32 PM	Bypass valve closed
8/13/2012	5:39:32 PM	H2 valve opened
8/13/2012	5:39:32 PM	Bubbler valve opened
8/13/2012	5:39:32 PM	Helium MFC set to  0.000000
8/13/2012	5:39:32 PM	H2 MFC set to  500.000000
8/13/2012	5:39:32 PM	BCl3 MFC set to  0.000000
8/13/2012	5:39:32 PM	PH3 MFC set to  0.000000
8/13/2012	5:39:32 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:39:32 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:39:33 PM	Tube furnace set to 900
8/13/2012	5:42:33 PM	Helium valve closed
8/13/2012	5:42:33 PM	BCl3 valve closed
8/13/2012	5:42:33 PM	PH3 valve closed
8/13/2012	5:42:33 PM	SiCl4 pre valve closed
8/13/2012	5:42:33 PM	SiCl4 post valve closed
8/13/2012	5:42:33 PM	Main Vac valve closed
8/13/2012	5:42:33 PM	Bypass valve closed
8/13/2012	5:42:33 PM	H2 valve opened
8/13/2012	5:42:33 PM	Bubbler valve opened
8/13/2012	5:42:33 PM	Helium MFC set to  0.000000
8/13/2012	5:42:33 PM	H2 MFC set to  500.000000
8/13/2012	5:42:33 PM	BCl3 MFC set to  0.000000
8/13/2012	5:42:33 PM	PH3 MFC set to  0.000000
8/13/2012	5:42:33 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:42:33 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:42:33 PM	Tube furnace set to 850
8/13/2012	5:45:33 PM	Helium valve closed
8/13/2012	5:45:33 PM	BCl3 valve closed
8/13/2012	5:45:33 PM	PH3 valve closed
8/13/2012	5:45:33 PM	SiCl4 pre valve closed
8/13/2012	5:45:33 PM	SiCl4 post valve closed
8/13/2012	5:45:33 PM	Main Vac valve closed
8/13/2012	5:45:33 PM	Bypass valve closed
8/13/2012	5:45:33 PM	H2 valve opened
8/13/2012	5:45:33 PM	Bubbler valve opened
8/13/2012	5:45:33 PM	Helium MFC set to  0.000000
8/13/2012	5:45:33 PM	H2 MFC set to  500.000000
8/13/2012	5:45:33 PM	BCl3 MFC set to  0.000000
8/13/2012	5:45:33 PM	PH3 MFC set to  0.000000
8/13/2012	5:45:33 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:45:33 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:45:33 PM	Tube furnace set to 800
8/13/2012	5:48:33 PM	Helium valve closed
8/13/2012	5:48:33 PM	BCl3 valve closed
8/13/2012	5:48:33 PM	PH3 valve closed
8/13/2012	5:48:33 PM	SiCl4 pre valve closed
8/13/2012	5:48:33 PM	SiCl4 post valve closed
8/13/2012	5:48:33 PM	Main Vac valve closed
8/13/2012	5:48:33 PM	Bypass valve closed
8/13/2012	5:48:33 PM	H2 valve opened
8/13/2012	5:48:33 PM	Bubbler valve opened
8/13/2012	5:48:33 PM	Helium MFC set to  0.000000
8/13/2012	5:48:33 PM	H2 MFC set to  500.000000
8/13/2012	5:48:33 PM	BCl3 MFC set to  0.000000
8/13/2012	5:48:33 PM	PH3 MFC set to  0.000000
8/13/2012	5:48:33 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:48:33 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:48:33 PM	Tube furnace set to 750
8/13/2012	5:51:33 PM	H2 valve closed
8/13/2012	5:51:33 PM	BCl3 valve closed
8/13/2012	5:51:33 PM	PH3 valve closed
8/13/2012	5:51:33 PM	SiCl4 pre valve closed
8/13/2012	5:51:33 PM	SiCl4 post valve closed
8/13/2012	5:51:33 PM	Main Vac valve closed
8/13/2012	5:51:33 PM	Bypass valve closed
8/13/2012	5:51:33 PM	Helium valve opened
8/13/2012	5:51:33 PM	Bubbler valve opened
8/13/2012	5:51:33 PM	Helium MFC set to  400.000000
8/13/2012	5:51:33 PM	H2 MFC set to  0.000000
8/13/2012	5:51:33 PM	BCl3 MFC set to  0.000000
8/13/2012	5:51:33 PM	PH3 MFC set to  0.000000
8/13/2012	5:51:33 PM	SiCl4 MFC set to  0.000000
8/13/2012	5:51:33 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	5:51:33 PM	Tube furnace set to 0
8/13/2012	6:16:33 PM	Helium valve closed
8/13/2012	6:16:33 PM	H2 valve closed
8/13/2012	6:16:33 PM	BCl3 valve closed
8/13/2012	6:16:33 PM	PH3 valve closed
8/13/2012	6:16:33 PM	SiCl4 pre valve closed
8/13/2012	6:16:33 PM	SiCl4 post valve closed
8/13/2012	6:16:33 PM	Main Vac valve closed
8/13/2012	6:16:33 PM	Bypass valve closed
8/13/2012	6:16:33 PM	Bubbler valve closed
8/13/2012	6:16:33 PM	Helium MFC set to  0.000000
8/13/2012	6:16:33 PM	H2 MFC set to  0.000000
8/13/2012	6:16:34 PM	BCl3 MFC set to  0.000000
8/13/2012	6:16:34 PM	PH3 MFC set to  0.000000
8/13/2012	6:16:34 PM	SiCl4 MFC set to  0.000000
8/13/2012	6:16:34 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	6:16:34 PM	Tube furnace set to 50
8/13/2012	6:21:34 PM	Helium valve closed
8/13/2012	6:21:34 PM	H2 valve closed
8/13/2012	6:21:34 PM	BCl3 valve closed
8/13/2012	6:21:34 PM	PH3 valve closed
8/13/2012	6:21:34 PM	SiCl4 pre valve closed
8/13/2012	6:21:34 PM	SiCl4 post valve closed
8/13/2012	6:21:34 PM	Main Vac valve closed
8/13/2012	6:21:34 PM	Bubbler valve closed
8/13/2012	6:21:34 PM	Bypass valve opened
8/13/2012	6:21:34 PM	Helium MFC set to  0.000000
8/13/2012	6:21:34 PM	H2 MFC set to  0.000000
8/13/2012	6:21:34 PM	BCl3 MFC set to  0.000000
8/13/2012	6:21:34 PM	PH3 MFC set to  0.000000
8/13/2012	6:21:34 PM	SiCl4 MFC set to  0.000000
8/13/2012	6:21:34 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	6:21:34 PM	Tube furnace set to 0
8/13/2012	6:22:30 PM	Helium valve closed
8/13/2012	6:22:30 PM	H2 valve closed
8/13/2012	6:22:30 PM	BCl3 valve closed
8/13/2012	6:22:30 PM	PH3 valve closed
8/13/2012	6:22:30 PM	SiCl4 pre valve closed
8/13/2012	6:22:30 PM	SiCl4 post valve closed
8/13/2012	6:22:30 PM	Bypass valve closed
8/13/2012	6:22:30 PM	Bubbler valve closed
8/13/2012	6:22:30 PM	Main Vac valve opened
8/13/2012	6:22:30 PM	Helium MFC set to  0.000000
8/13/2012	6:22:30 PM	H2 MFC set to  0.000000
8/13/2012	6:22:30 PM	BCl3 MFC set to  0.000000
8/13/2012	6:22:30 PM	PH3 MFC set to  0.000000
8/13/2012	6:22:30 PM	SiCl4 MFC set to  0.000000
8/13/2012	6:22:30 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	6:22:31 PM	Tube furnace set to 0
8/13/2012	6:22:32 PM	Run finished at 6:22 PM
8/13/2012	7:16:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2012	7:16:46 PM	Recipe started at 7:16 PM
8/13/2012	7:16:46 PM	Helium valve closed
8/13/2012	7:16:46 PM	H2 valve closed
8/13/2012	7:16:46 PM	BCl3 valve closed
8/13/2012	7:16:46 PM	PH3 valve closed
8/13/2012	7:16:46 PM	SiCl4 pre valve closed
8/13/2012	7:16:46 PM	SiCl4 post valve closed
8/13/2012	7:16:46 PM	Main Vac valve closed
8/13/2012	7:16:46 PM	Bypass valve closed
8/13/2012	7:16:46 PM	Bubbler valve closed
8/13/2012	7:16:46 PM	Helium MFC set to  0.000000
8/13/2012	7:16:46 PM	H2 MFC set to  0.000000
8/13/2012	7:16:46 PM	BCl3 MFC set to  0.000000
8/13/2012	7:16:46 PM	PH3 MFC set to  0.000000
8/13/2012	7:16:46 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:16:46 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:16:46 PM	Tube furnace set to 0
8/13/2012	7:16:49 PM	H2 valve closed
8/13/2012	7:16:49 PM	BCl3 valve closed
8/13/2012	7:16:49 PM	PH3 valve closed
8/13/2012	7:16:49 PM	SiCl4 pre valve closed
8/13/2012	7:16:49 PM	SiCl4 post valve closed
8/13/2012	7:16:49 PM	Main Vac valve closed
8/13/2012	7:16:49 PM	Bypass valve closed
8/13/2012	7:16:49 PM	Bubbler valve closed
8/13/2012	7:16:49 PM	Helium valve opened
8/13/2012	7:16:49 PM	Helium MFC set to  500.000000
8/13/2012	7:16:49 PM	H2 MFC set to  0.000000
8/13/2012	7:16:49 PM	BCl3 MFC set to  0.000000
8/13/2012	7:16:49 PM	PH3 MFC set to  0.000000
8/13/2012	7:16:49 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:16:49 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:16:50 PM	Tube furnace set to 0
8/13/2012	7:18:02 PM	Helium valve closed
8/13/2012	7:18:02 PM	H2 valve closed
8/13/2012	7:18:02 PM	BCl3 valve closed
8/13/2012	7:18:02 PM	PH3 valve closed
8/13/2012	7:18:02 PM	SiCl4 pre valve closed
8/13/2012	7:18:02 PM	SiCl4 post valve closed
8/13/2012	7:18:02 PM	Main Vac valve closed
8/13/2012	7:18:02 PM	Bypass valve closed
8/13/2012	7:18:02 PM	Bubbler valve closed
8/13/2012	7:18:02 PM	Helium MFC set to  0.000000
8/13/2012	7:18:02 PM	H2 MFC set to  0.000000
8/13/2012	7:18:02 PM	BCl3 MFC set to  0.000000
8/13/2012	7:18:02 PM	PH3 MFC set to  0.000000
8/13/2012	7:18:02 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:18:02 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:18:02 PM	Tube furnace set to 0
8/13/2012	7:18:03 PM	Run finished at 7:18 PM
8/13/2012	7:18:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2012	7:21:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2012	7:21:40 PM	Recipe started at 7:21 PM
8/13/2012	7:21:40 PM	Helium valve closed
8/13/2012	7:21:40 PM	H2 valve closed
8/13/2012	7:21:40 PM	BCl3 valve closed
8/13/2012	7:21:40 PM	PH3 valve closed
8/13/2012	7:21:40 PM	SiCl4 pre valve closed
8/13/2012	7:21:40 PM	SiCl4 post valve closed
8/13/2012	7:21:40 PM	Main Vac valve closed
8/13/2012	7:21:40 PM	Bubbler valve closed
8/13/2012	7:21:40 PM	Bypass valve opened
8/13/2012	7:21:40 PM	Helium MFC set to  0.000000
8/13/2012	7:21:40 PM	H2 MFC set to  0.000000
8/13/2012	7:21:40 PM	BCl3 MFC set to  0.000000
8/13/2012	7:21:40 PM	PH3 MFC set to  0.000000
8/13/2012	7:21:40 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:21:40 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:21:40 PM	Tube furnace set to 0
8/13/2012	7:22:57 PM	Helium valve closed
8/13/2012	7:22:57 PM	H2 valve closed
8/13/2012	7:22:57 PM	BCl3 valve closed
8/13/2012	7:22:57 PM	PH3 valve closed
8/13/2012	7:22:57 PM	SiCl4 pre valve closed
8/13/2012	7:22:57 PM	SiCl4 post valve closed
8/13/2012	7:22:57 PM	Main Vac valve closed
8/13/2012	7:22:57 PM	Bubbler valve closed
8/13/2012	7:22:57 PM	Bypass valve opened
8/13/2012	7:22:57 PM	Helium MFC set to  0.000000
8/13/2012	7:22:57 PM	H2 MFC set to  0.000000
8/13/2012	7:22:57 PM	BCl3 MFC set to  0.000000
8/13/2012	7:22:57 PM	PH3 MFC set to  0.000000
8/13/2012	7:22:57 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:22:57 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:22:57 PM	Tube furnace set to 0
8/13/2012	7:23:57 PM	Helium valve closed
8/13/2012	7:23:57 PM	H2 valve closed
8/13/2012	7:23:57 PM	BCl3 valve closed
8/13/2012	7:23:57 PM	PH3 valve closed
8/13/2012	7:23:57 PM	SiCl4 pre valve closed
8/13/2012	7:23:57 PM	SiCl4 post valve closed
8/13/2012	7:23:57 PM	Bypass valve closed
8/13/2012	7:23:57 PM	Bubbler valve closed
8/13/2012	7:23:57 PM	Main Vac valve opened
8/13/2012	7:23:57 PM	Helium MFC set to  0.000000
8/13/2012	7:23:57 PM	H2 MFC set to  0.000000
8/13/2012	7:23:57 PM	BCl3 MFC set to  0.000000
8/13/2012	7:23:57 PM	PH3 MFC set to  0.000000
8/13/2012	7:23:57 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:23:57 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:23:57 PM	Tube furnace set to 0
8/13/2012	7:23:58 PM	Run finished at 7:23 PM
8/13/2012	7:23:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2012	7:50:35 PM	Main Vac valve closed
8/13/2012	7:50:50 PM	Main Vac valve opened
8/13/2012	7:50:52 PM	Helium valve opened
8/13/2012	7:50:55 PM	Helium MFC set to  10.000000
8/13/2012	7:51:17 PM	Helium valve closed
8/13/2012	7:51:44 PM	Recipe started at 7:51 PM
8/13/2012	7:51:44 PM	Helium valve closed
8/13/2012	7:51:44 PM	H2 valve closed
8/13/2012	7:51:44 PM	BCl3 valve closed
8/13/2012	7:51:44 PM	PH3 valve closed
8/13/2012	7:51:44 PM	SiCl4 pre valve closed
8/13/2012	7:51:44 PM	SiCl4 post valve closed
8/13/2012	7:51:44 PM	Main Vac valve closed
8/13/2012	7:51:44 PM	Bypass valve closed
8/13/2012	7:51:44 PM	Bubbler valve closed
8/13/2012	7:51:44 PM	Helium MFC set to  0.000000
8/13/2012	7:51:44 PM	H2 MFC set to  0.000000
8/13/2012	7:51:44 PM	BCl3 MFC set to  0.000000
8/13/2012	7:51:44 PM	PH3 MFC set to  0.000000
8/13/2012	7:51:44 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:51:44 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:51:44 PM	Tube furnace set to 0
8/13/2012	7:51:47 PM	Helium valve closed
8/13/2012	7:51:47 PM	BCl3 valve closed
8/13/2012	7:51:47 PM	PH3 valve closed
8/13/2012	7:51:47 PM	SiCl4 pre valve closed
8/13/2012	7:51:47 PM	SiCl4 post valve closed
8/13/2012	7:51:47 PM	Main Vac valve closed
8/13/2012	7:51:47 PM	Bypass valve closed
8/13/2012	7:51:47 PM	Bubbler valve closed
8/13/2012	7:51:47 PM	H2 valve opened
8/13/2012	7:51:47 PM	Helium MFC set to  0.000000
8/13/2012	7:51:47 PM	H2 MFC set to  500.000000
8/13/2012	7:51:47 PM	BCl3 MFC set to  0.000000
8/13/2012	7:51:47 PM	PH3 MFC set to  0.000000
8/13/2012	7:51:47 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:51:47 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:51:47 PM	Tube furnace set to 50
8/13/2012	7:53:02 PM	Helium valve closed
8/13/2012	7:53:02 PM	BCl3 valve closed
8/13/2012	7:53:02 PM	PH3 valve closed
8/13/2012	7:53:02 PM	SiCl4 pre valve closed
8/13/2012	7:53:02 PM	SiCl4 post valve closed
8/13/2012	7:53:02 PM	Main Vac valve closed
8/13/2012	7:53:02 PM	Bypass valve closed
8/13/2012	7:53:02 PM	H2 valve opened
8/13/2012	7:53:02 PM	Bubbler valve opened
8/13/2012	7:53:02 PM	Helium MFC set to  0.000000
8/13/2012	7:53:02 PM	H2 MFC set to  500.000000
8/13/2012	7:53:02 PM	BCl3 MFC set to  0.000000
8/13/2012	7:53:02 PM	PH3 MFC set to  0.000000
8/13/2012	7:53:02 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:53:02 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:53:02 PM	Tube furnace set to 50
8/13/2012	7:53:03 PM	Helium valve closed
8/13/2012	7:53:03 PM	BCl3 valve closed
8/13/2012	7:53:03 PM	PH3 valve closed
8/13/2012	7:53:03 PM	SiCl4 pre valve closed
8/13/2012	7:53:03 PM	SiCl4 post valve closed
8/13/2012	7:53:03 PM	Main Vac valve closed
8/13/2012	7:53:03 PM	Bypass valve closed
8/13/2012	7:53:03 PM	H2 valve opened
8/13/2012	7:53:03 PM	Bubbler valve opened
8/13/2012	7:53:03 PM	Helium MFC set to  0.000000
8/13/2012	7:53:03 PM	H2 MFC set to  500.000000
8/13/2012	7:53:03 PM	BCl3 MFC set to  0.000000
8/13/2012	7:53:03 PM	PH3 MFC set to  0.000000
8/13/2012	7:53:03 PM	SiCl4 MFC set to  0.000000
8/13/2012	7:53:03 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	7:53:03 PM	Tube furnace set to 1000
8/13/2012	8:13:03 PM	Helium valve closed
8/13/2012	8:13:03 PM	BCl3 valve closed
8/13/2012	8:13:03 PM	PH3 valve closed
8/13/2012	8:13:03 PM	Main Vac valve closed
8/13/2012	8:13:03 PM	Bypass valve closed
8/13/2012	8:13:03 PM	H2 valve opened
8/13/2012	8:13:03 PM	SiCl4 pre valve opened
8/13/2012	8:13:03 PM	SiCl4 post valve opened
8/13/2012	8:13:03 PM	Bubbler valve opened
8/13/2012	8:13:03 PM	Helium MFC set to  0.000000
8/13/2012	8:13:03 PM	H2 MFC set to  450.000000
8/13/2012	8:13:03 PM	BCl3 MFC set to  0.000000
8/13/2012	8:13:03 PM	PH3 MFC set to  0.000000
8/13/2012	8:13:03 PM	SiCl4 MFC set to  50.000000
8/13/2012	8:13:03 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:13:03 PM	Tube furnace set to 1000
8/13/2012	8:33:03 PM	Helium valve closed
8/13/2012	8:33:03 PM	BCl3 valve closed
8/13/2012	8:33:03 PM	PH3 valve closed
8/13/2012	8:33:03 PM	SiCl4 pre valve closed
8/13/2012	8:33:03 PM	SiCl4 post valve closed
8/13/2012	8:33:03 PM	Main Vac valve closed
8/13/2012	8:33:03 PM	Bypass valve closed
8/13/2012	8:33:03 PM	H2 valve opened
8/13/2012	8:33:03 PM	Bubbler valve opened
8/13/2012	8:33:03 PM	Helium MFC set to  0.000000
8/13/2012	8:33:03 PM	H2 MFC set to  500.000000
8/13/2012	8:33:03 PM	BCl3 MFC set to  0.000000
8/13/2012	8:33:03 PM	PH3 MFC set to  0.000000
8/13/2012	8:33:03 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:33:03 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:33:03 PM	Tube furnace set to 950
8/13/2012	8:36:03 PM	Helium valve closed
8/13/2012	8:36:03 PM	BCl3 valve closed
8/13/2012	8:36:03 PM	PH3 valve closed
8/13/2012	8:36:03 PM	SiCl4 pre valve closed
8/13/2012	8:36:04 PM	SiCl4 post valve closed
8/13/2012	8:36:04 PM	Main Vac valve closed
8/13/2012	8:36:04 PM	Bypass valve closed
8/13/2012	8:36:04 PM	H2 valve opened
8/13/2012	8:36:04 PM	Bubbler valve opened
8/13/2012	8:36:04 PM	Helium MFC set to  0.000000
8/13/2012	8:36:04 PM	H2 MFC set to  500.000000
8/13/2012	8:36:04 PM	BCl3 MFC set to  0.000000
8/13/2012	8:36:04 PM	PH3 MFC set to  0.000000
8/13/2012	8:36:04 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:36:04 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:36:04 PM	Tube furnace set to 900
8/13/2012	8:39:04 PM	Helium valve closed
8/13/2012	8:39:04 PM	BCl3 valve closed
8/13/2012	8:39:04 PM	PH3 valve closed
8/13/2012	8:39:04 PM	SiCl4 pre valve closed
8/13/2012	8:39:04 PM	SiCl4 post valve closed
8/13/2012	8:39:04 PM	Main Vac valve closed
8/13/2012	8:39:04 PM	Bypass valve closed
8/13/2012	8:39:04 PM	H2 valve opened
8/13/2012	8:39:04 PM	Bubbler valve opened
8/13/2012	8:39:04 PM	Helium MFC set to  0.000000
8/13/2012	8:39:04 PM	H2 MFC set to  500.000000
8/13/2012	8:39:04 PM	BCl3 MFC set to  0.000000
8/13/2012	8:39:04 PM	PH3 MFC set to  0.000000
8/13/2012	8:39:04 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:39:04 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:39:04 PM	Tube furnace set to 850
8/13/2012	8:42:04 PM	Helium valve closed
8/13/2012	8:42:04 PM	BCl3 valve closed
8/13/2012	8:42:04 PM	PH3 valve closed
8/13/2012	8:42:04 PM	SiCl4 pre valve closed
8/13/2012	8:42:04 PM	SiCl4 post valve closed
8/13/2012	8:42:04 PM	Main Vac valve closed
8/13/2012	8:42:04 PM	Bypass valve closed
8/13/2012	8:42:04 PM	H2 valve opened
8/13/2012	8:42:04 PM	Bubbler valve opened
8/13/2012	8:42:04 PM	Helium MFC set to  0.000000
8/13/2012	8:42:04 PM	H2 MFC set to  500.000000
8/13/2012	8:42:04 PM	BCl3 MFC set to  0.000000
8/13/2012	8:42:04 PM	PH3 MFC set to  0.000000
8/13/2012	8:42:04 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:42:04 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:42:04 PM	Tube furnace set to 800
8/13/2012	8:45:04 PM	Helium valve closed
8/13/2012	8:45:04 PM	BCl3 valve closed
8/13/2012	8:45:04 PM	PH3 valve closed
8/13/2012	8:45:04 PM	SiCl4 pre valve closed
8/13/2012	8:45:04 PM	SiCl4 post valve closed
8/13/2012	8:45:04 PM	Main Vac valve closed
8/13/2012	8:45:04 PM	Bypass valve closed
8/13/2012	8:45:04 PM	H2 valve opened
8/13/2012	8:45:04 PM	Bubbler valve opened
8/13/2012	8:45:04 PM	Helium MFC set to  0.000000
8/13/2012	8:45:04 PM	H2 MFC set to  500.000000
8/13/2012	8:45:04 PM	BCl3 MFC set to  0.000000
8/13/2012	8:45:04 PM	PH3 MFC set to  0.000000
8/13/2012	8:45:04 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:45:04 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:45:04 PM	Tube furnace set to 750
8/13/2012	8:48:04 PM	H2 valve closed
8/13/2012	8:48:04 PM	BCl3 valve closed
8/13/2012	8:48:04 PM	PH3 valve closed
8/13/2012	8:48:04 PM	SiCl4 pre valve closed
8/13/2012	8:48:04 PM	SiCl4 post valve closed
8/13/2012	8:48:04 PM	Main Vac valve closed
8/13/2012	8:48:04 PM	Bypass valve closed
8/13/2012	8:48:04 PM	Helium valve opened
8/13/2012	8:48:04 PM	Bubbler valve opened
8/13/2012	8:48:04 PM	Helium MFC set to  400.000000
8/13/2012	8:48:04 PM	H2 MFC set to  0.000000
8/13/2012	8:48:04 PM	BCl3 MFC set to  0.000000
8/13/2012	8:48:04 PM	PH3 MFC set to  0.000000
8/13/2012	8:48:04 PM	SiCl4 MFC set to  0.000000
8/13/2012	8:48:04 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	8:48:05 PM	Tube furnace set to 0
8/13/2012	9:13:05 PM	Helium valve closed
8/13/2012	9:13:05 PM	H2 valve closed
8/13/2012	9:13:05 PM	BCl3 valve closed
8/13/2012	9:13:05 PM	PH3 valve closed
8/13/2012	9:13:05 PM	SiCl4 pre valve closed
8/13/2012	9:13:05 PM	SiCl4 post valve closed
8/13/2012	9:13:05 PM	Main Vac valve closed
8/13/2012	9:13:05 PM	Bypass valve closed
8/13/2012	9:13:05 PM	Bubbler valve closed
8/13/2012	9:13:05 PM	Helium MFC set to  0.000000
8/13/2012	9:13:05 PM	H2 MFC set to  0.000000
8/13/2012	9:13:05 PM	BCl3 MFC set to  0.000000
8/13/2012	9:13:05 PM	PH3 MFC set to  0.000000
8/13/2012	9:13:05 PM	SiCl4 MFC set to  0.000000
8/13/2012	9:13:05 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	9:13:05 PM	Tube furnace set to 50
8/13/2012	9:18:05 PM	Helium valve closed
8/13/2012	9:18:05 PM	H2 valve closed
8/13/2012	9:18:05 PM	BCl3 valve closed
8/13/2012	9:18:05 PM	PH3 valve closed
8/13/2012	9:18:05 PM	SiCl4 pre valve closed
8/13/2012	9:18:05 PM	SiCl4 post valve closed
8/13/2012	9:18:05 PM	Main Vac valve closed
8/13/2012	9:18:05 PM	Bubbler valve closed
8/13/2012	9:18:05 PM	Bypass valve opened
8/13/2012	9:18:05 PM	Helium MFC set to  0.000000
8/13/2012	9:18:05 PM	H2 MFC set to  0.000000
8/13/2012	9:18:05 PM	BCl3 MFC set to  0.000000
8/13/2012	9:18:05 PM	PH3 MFC set to  0.000000
8/13/2012	9:18:05 PM	SiCl4 MFC set to  0.000000
8/13/2012	9:18:05 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	9:18:05 PM	Tube furnace set to 0
8/13/2012	9:19:03 PM	Helium valve closed
8/13/2012	9:19:03 PM	H2 valve closed
8/13/2012	9:19:03 PM	BCl3 valve closed
8/13/2012	9:19:03 PM	PH3 valve closed
8/13/2012	9:19:03 PM	SiCl4 pre valve closed
8/13/2012	9:19:03 PM	SiCl4 post valve closed
8/13/2012	9:19:03 PM	Bypass valve closed
8/13/2012	9:19:03 PM	Bubbler valve closed
8/13/2012	9:19:03 PM	Main Vac valve opened
8/13/2012	9:19:03 PM	Helium MFC set to  0.000000
8/13/2012	9:19:03 PM	H2 MFC set to  0.000000
8/13/2012	9:19:03 PM	BCl3 MFC set to  0.000000
8/13/2012	9:19:03 PM	PH3 MFC set to  0.000000
8/13/2012	9:19:03 PM	SiCl4 MFC set to  0.000000
8/13/2012	9:19:03 PM	Bypass solenoid MFC set to  0.000000
8/13/2012	9:19:03 PM	Tube furnace set to 0
8/13/2012	9:19:04 PM	Run finished at 9:19 PM
